2/18/2012	8:31:05 AM	Main Vac valve closed
2/18/2012	8:31:36 AM	Main Vac valve opened
2/18/2012	8:32:17 AM	Recipe started at 8:32 AM
2/18/2012	8:32:17 AM	Helium valve closed
2/18/2012	8:32:17 AM	H2 valve closed
2/18/2012	8:32:17 AM	BCl3 valve closed
2/18/2012	8:32:17 AM	PH3 valve closed
2/18/2012	8:32:17 AM	SiCl4 pre valve closed
2/18/2012	8:32:17 AM	SiCl4 post valve closed
2/18/2012	8:32:17 AM	Main Vac valve closed
2/18/2012	8:32:17 AM	Bypass valve closed
2/18/2012	8:32:17 AM	Bubbler valve closed
2/18/2012	8:32:17 AM	Helium MFC set to  0.000000
2/18/2012	8:32:17 AM	H2 MFC set to  0.000000
2/18/2012	8:32:17 AM	BCl3 MFC set to  0.000000
2/18/2012	8:32:17 AM	PH3 MFC set to  0.000000
2/18/2012	8:32:17 AM	SiCl4 MFC set to  0.000000
2/18/2012	8:32:17 AM	Bypass solenoid MFC set to  0.000000
2/18/2012	8:32:17 AM	Tube furnace set to 0
2/18/2012	8:32:20 AM	Helium valve closed
2/18/2012	8:32:20 AM	BCl3 valve closed
2/18/2012	8:32:20 AM	PH3 valve closed
2/18/2012	8:32:20 AM	SiCl4 pre valve closed
2/18/2012	8:32:20 AM	SiCl4 post valve closed
2/18/2012	8:32:20 AM	Main Vac valve closed
2/18/2012	8:32:20 AM	Bypass valve closed
2/18/2012	8:32:20 AM	Bubbler valve closed
2/18/2012	8:32:20 AM	H2 valve opened
2/18/2012	8:32:20 AM	Helium MFC set to  0.000000
2/18/2012	8:32:20 AM	H2 MFC set to  500.000000
2/18/2012	8:32:20 AM	BCl3 MFC set to  0.000000
2/18/2012	8:32:20 AM	PH3 MFC set to  0.000000
2/18/2012	8:32:20 AM	SiCl4 MFC set to  0.000000
2/18/2012	8:32:20 AM	Bypass solenoid MFC set to  0.000000
2/18/2012	8:32:21 AM	Tube furnace set to 0
2/18/2012	8:33:30 AM	Helium valve closed
2/18/2012	8:33:30 AM	BCl3 valve closed
2/18/2012	8:33:30 AM	PH3 valve closed
2/18/2012	8:33:30 AM	SiCl4 pre valve closed
2/18/2012	8:33:30 AM	SiCl4 post valve closed
2/18/2012	8:33:30 AM	Main Vac valve closed
2/18/2012	8:33:30 AM	Bypass valve closed
2/18/2012	8:33:30 AM	H2 valve opened
2/18/2012	8:33:30 AM	Bubbler valve opened
2/18/2012	8:33:30 AM	Helium MFC set to  0.000000
2/18/2012	8:33:30 AM	H2 MFC set to  500.000000
2/18/2012	8:33:30 AM	BCl3 MFC set to  0.000000
2/18/2012	8:33:30 AM	PH3 MFC set to  0.000000
2/18/2012	8:33:30 AM	SiCl4 MFC set to  0.000000
2/18/2012	8:33:30 AM	Bypass solenoid MFC set to  0.000000
2/18/2012	8:33:30 AM	Tube furnace set to 0
2/18/2012	8:33:31 AM	Helium valve closed
2/18/2012	8:33:31 AM	BCl3 valve closed
2/18/2012	8:33:31 AM	PH3 valve closed
2/18/2012	8:33:31 AM	SiCl4 pre valve closed
2/18/2012	8:33:31 AM	SiCl4 post valve closed
2/18/2012	8:33:31 AM	Main Vac valve closed
2/18/2012	8:33:31 AM	Bypass valve closed
2/18/2012	8:33:31 AM	H2 valve opened
2/18/2012	8:33:31 AM	Bubbler valve opened
2/18/2012	8:33:31 AM	Helium MFC set to  0.000000
2/18/2012	8:33:31 AM	H2 MFC set to  500.000000
2/18/2012	8:33:31 AM	BCl3 MFC set to  0.000000
2/18/2012	8:33:31 AM	PH3 MFC set to  0.000000
2/18/2012	8:33:31 AM	SiCl4 MFC set to  0.000000
2/18/2012	8:33:31 AM	Bypass solenoid MFC set to  0.000000
2/18/2012	8:33:31 AM	Tube furnace set to 950
2/18/2012	8:48:31 AM	Helium valve closed
2/18/2012	8:48:31 AM	PH3 valve closed
2/18/2012	8:48:31 AM	SiCl4 pre valve closed
2/18/2012	8:48:31 AM	SiCl4 post valve closed
2/18/2012	8:48:31 AM	Main Vac valve closed
2/18/2012	8:48:31 AM	Bypass valve closed
2/18/2012	8:48:31 AM	H2 valve opened
2/18/2012	8:48:31 AM	BCl3 valve opened
2/18/2012	8:48:31 AM	Bubbler valve opened
2/18/2012	8:48:31 AM	Helium MFC set to  0.000000
2/18/2012	8:48:31 AM	H2 MFC set to  400.000000
2/18/2012	8:48:31 AM	BCl3 MFC set to  20.000000
2/18/2012	8:48:31 AM	PH3 MFC set to  0.000000
2/18/2012	8:48:31 AM	SiCl4 MFC set to  0.000000
2/18/2012	8:48:31 AM	Bypass solenoid MFC set to  0.000000
2/18/2012	8:48:31 AM	Tube furnace set to 950
2/18/2012	9:18:31 AM	Helium valve closed
2/18/2012	9:18:31 AM	BCl3 valve closed
2/18/2012	9:18:31 AM	PH3 valve closed
2/18/2012	9:18:31 AM	SiCl4 pre valve closed
2/18/2012	9:18:31 AM	SiCl4 post valve closed
2/18/2012	9:18:31 AM	Main Vac valve closed
2/18/2012	9:18:31 AM	Bypass valve closed
2/18/2012	9:18:31 AM	H2 valve opened
2/18/2012	9:18:31 AM	Bubbler valve opened
2/18/2012	9:18:31 AM	Helium MFC set to  0.000000
2/18/2012	9:18:31 AM	H2 MFC set to  500.000000
2/18/2012	9:18:31 AM	BCl3 MFC set to  0.000000
2/18/2012	9:18:31 AM	PH3 MFC set to  0.000000
2/18/2012	9:18:31 AM	SiCl4 MFC set to  0.000000
2/18/2012	9:18:31 AM	Bypass solenoid MFC set to  0.000000
2/18/2012	9:18:32 AM	Tube furnace set to 750
2/18/2012	9:23:32 AM	H2 valve closed
2/18/2012	9:23:32 AM	BCl3 valve closed
2/18/2012	9:23:32 AM	PH3 valve closed
2/18/2012	9:23:32 AM	SiCl4 pre valve closed
2/18/2012	9:23:32 AM	SiCl4 post valve closed
2/18/2012	9:23:32 AM	Main Vac valve closed
2/18/2012	9:23:32 AM	Bypass valve closed
2/18/2012	9:23:32 AM	Helium valve opened
2/18/2012	9:23:32 AM	Bubbler valve opened
2/18/2012	9:23:32 AM	Helium MFC set to  500.000000
2/18/2012	9:23:32 AM	H2 MFC set to  0.000000
2/18/2012	9:23:32 AM	BCl3 MFC set to  0.000000
2/18/2012	9:23:32 AM	PH3 MFC set to  0.000000
2/18/2012	9:23:32 AM	SiCl4 MFC set to  0.000000
2/18/2012	9:23:32 AM	Bypass solenoid MFC set to  0.000000
2/18/2012	9:23:32 AM	Tube furnace set to 0
2/18/2012	9:43:32 AM	Helium valve closed
2/18/2012	9:43:32 AM	H2 valve closed
2/18/2012	9:43:32 AM	BCl3 valve closed
2/18/2012	9:43:32 AM	PH3 valve closed
2/18/2012	9:43:32 AM	SiCl4 pre valve closed
2/18/2012	9:43:32 AM	SiCl4 post valve closed
2/18/2012	9:43:32 AM	Main Vac valve closed
2/18/2012	9:43:32 AM	Bypass valve closed
2/18/2012	9:43:32 AM	Bubbler valve closed
2/18/2012	9:43:32 AM	Helium MFC set to  0.000000
2/18/2012	9:43:32 AM	H2 MFC set to  0.000000
2/18/2012	9:43:32 AM	BCl3 MFC set to  0.000000
2/18/2012	9:43:32 AM	PH3 MFC set to  0.000000
2/18/2012	9:43:32 AM	SiCl4 MFC set to  0.000000
2/18/2012	9:43:32 AM	Bypass solenoid MFC set to  0.000000
2/18/2012	9:43:32 AM	Tube furnace set to 0
2/18/2012	9:43:33 AM	Run finished at 9:43 AM
2/18/2012	11:51:33 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/18/2012	11:51:34 AM	Recipe started at 11:51 AM
2/18/2012	11:51:34 AM	Helium valve closed
2/18/2012	11:51:34 AM	H2 valve closed
2/18/2012	11:51:34 AM	BCl3 valve closed
2/18/2012	11:51:34 AM	PH3 valve closed
2/18/2012	11:51:34 AM	SiCl4 pre valve closed
2/18/2012	11:51:34 AM	SiCl4 post valve closed
2/18/2012	11:51:34 AM	Main Vac valve closed
2/18/2012	11:51:34 AM	Bypass valve closed
2/18/2012	11:51:34 AM	Bubbler valve closed
2/18/2012	11:51:34 AM	Helium MFC set to  0.000000
2/18/2012	11:51:34 AM	H2 MFC set to  0.000000
2/18/2012	11:51:34 AM	BCl3 MFC set to  0.000000
2/18/2012	11:51:34 AM	PH3 MFC set to  0.000000
2/18/2012	11:51:34 AM	SiCl4 MFC set to  0.000000
2/18/2012	11:51:34 AM	Bypass solenoid MFC set to  0.000000
2/18/2012	11:51:34 AM	Tube furnace set to 0
2/18/2012	11:51:37 AM	H2 valve closed
2/18/2012	11:51:37 AM	BCl3 valve closed
2/18/2012	11:51:37 AM	PH3 valve closed
2/18/2012	11:51:37 AM	SiCl4 pre valve closed
2/18/2012	11:51:37 AM	SiCl4 post valve closed
2/18/2012	11:51:37 AM	Main Vac valve closed
2/18/2012	11:51:37 AM	Bypass valve closed
2/18/2012	11:51:37 AM	Bubbler valve closed
2/18/2012	11:51:37 AM	Helium valve opened
2/18/2012	11:51:37 AM	Helium MFC set to  500.000000
2/18/2012	11:51:37 AM	H2 MFC set to  0.000000
2/18/2012	11:51:37 AM	BCl3 MFC set to  0.000000
2/18/2012	11:51:37 AM	PH3 MFC set to  0.000000
2/18/2012	11:51:37 AM	SiCl4 MFC set to  0.000000
2/18/2012	11:51:37 AM	Bypass solenoid MFC set to  0.000000
2/18/2012	11:51:37 AM	Tube furnace set to 0
2/18/2012	11:51:42 AM	Helium valve closed
2/18/2012	11:51:42 AM	H2 valve closed
2/18/2012	11:51:42 AM	BCl3 valve closed
2/18/2012	11:51:42 AM	PH3 valve closed
2/18/2012	11:51:42 AM	SiCl4 pre valve closed
2/18/2012	11:51:42 AM	SiCl4 post valve closed
2/18/2012	11:51:42 AM	Main Vac valve closed
2/18/2012	11:51:42 AM	Bypass valve closed
2/18/2012	11:51:42 AM	Bubbler valve closed
2/18/2012	11:51:42 AM	Helium MFC set to  0.000000
2/18/2012	11:51:42 AM	H2 MFC set to  0.000000
2/18/2012	11:51:42 AM	BCl3 MFC set to  0.000000
2/18/2012	11:51:42 AM	PH3 MFC set to  0.000000
2/18/2012	11:51:42 AM	SiCl4 MFC set to  0.000000
2/18/2012	11:51:42 AM	Bypass solenoid MFC set to  0.000000
2/18/2012	11:51:42 AM	Tube furnace set to 0
2/18/2012	11:51:43 AM	Run finished at 11:51 AM
2/18/2012	11:51:43 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/18/2012	11:53:30 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/18/2012	11:53:31 AM	Recipe started at 11:53 AM
2/18/2012	11:53:31 AM	Helium valve closed
2/18/2012	11:53:31 AM	H2 valve closed
2/18/2012	11:53:31 AM	BCl3 valve closed
2/18/2012	11:53:31 AM	PH3 valve closed
2/18/2012	11:53:31 AM	SiCl4 pre valve closed
2/18/2012	11:53:31 AM	SiCl4 post valve closed
2/18/2012	11:53:31 AM	Main Vac valve closed
2/18/2012	11:53:31 AM	Bubbler valve closed
2/18/2012	11:53:31 AM	Bypass valve opened
2/18/2012	11:53:31 AM	Helium MFC set to  0.000000
2/18/2012	11:53:31 AM	H2 MFC set to  0.000000
2/18/2012	11:53:31 AM	BCl3 MFC set to  0.000000
2/18/2012	11:53:31 AM	PH3 MFC set to  0.000000
2/18/2012	11:53:31 AM	SiCl4 MFC set to  0.000000
2/18/2012	11:53:31 AM	Bypass solenoid MFC set to  0.000000
2/18/2012	11:53:32 AM	Tube furnace set to 0
2/18/2012	11:54:30 AM	Helium valve closed
2/18/2012	11:54:30 AM	H2 valve closed
2/18/2012	11:54:30 AM	BCl3 valve closed
2/18/2012	11:54:30 AM	PH3 valve closed
2/18/2012	11:54:30 AM	SiCl4 pre valve closed
2/18/2012	11:54:30 AM	SiCl4 post valve closed
2/18/2012	11:54:30 AM	Main Vac valve closed
2/18/2012	11:54:30 AM	Bubbler valve closed
2/18/2012	11:54:30 AM	Bypass valve opened
2/18/2012	11:54:30 AM	Helium MFC set to  0.000000
2/18/2012	11:54:30 AM	H2 MFC set to  0.000000
2/18/2012	11:54:30 AM	BCl3 MFC set to  0.000000
2/18/2012	11:54:30 AM	PH3 MFC set to  0.000000
2/18/2012	11:54:30 AM	SiCl4 MFC set to  0.000000
2/18/2012	11:54:30 AM	Bypass solenoid MFC set to  0.000000
2/18/2012	11:54:30 AM	Tube furnace set to 0
2/18/2012	11:55:30 AM	Helium valve closed
2/18/2012	11:55:30 AM	H2 valve closed
2/18/2012	11:55:30 AM	BCl3 valve closed
2/18/2012	11:55:30 AM	PH3 valve closed
2/18/2012	11:55:30 AM	SiCl4 pre valve closed
2/18/2012	11:55:30 AM	SiCl4 post valve closed
2/18/2012	11:55:30 AM	Bypass valve closed
2/18/2012	11:55:30 AM	Bubbler valve closed
2/18/2012	11:55:30 AM	Main Vac valve opened
2/18/2012	11:55:30 AM	Helium MFC set to  0.000000
2/18/2012	11:55:30 AM	H2 MFC set to  0.000000
2/18/2012	11:55:30 AM	BCl3 MFC set to  0.000000
2/18/2012	11:55:30 AM	PH3 MFC set to  0.000000
2/18/2012	11:55:30 AM	SiCl4 MFC set to  0.000000
2/18/2012	11:55:30 AM	Bypass solenoid MFC set to  0.000000
2/18/2012	11:55:30 AM	Tube furnace set to 0
2/18/2012	11:55:31 AM	Run finished at 11:55 AM
2/18/2012	11:55:31 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/18/2012	6:32:42 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/18/2012	6:32:43 PM	Recipe started at 6:32 PM
2/18/2012	6:32:43 PM	Helium valve closed
2/18/2012	6:32:43 PM	H2 valve closed
2/18/2012	6:32:43 PM	BCl3 valve closed
2/18/2012	6:32:43 PM	PH3 valve closed
2/18/2012	6:32:43 PM	SiCl4 pre valve closed
2/18/2012	6:32:43 PM	SiCl4 post valve closed
2/18/2012	6:32:43 PM	Main Vac valve closed
2/18/2012	6:32:43 PM	Bypass valve closed
2/18/2012	6:32:43 PM	Bubbler valve closed
2/18/2012	6:32:43 PM	Helium MFC set to  0.000000
2/18/2012	6:32:43 PM	H2 MFC set to  0.000000
2/18/2012	6:32:43 PM	BCl3 MFC set to  0.000000
2/18/2012	6:32:43 PM	PH3 MFC set to  0.000000
2/18/2012	6:32:43 PM	SiCl4 MFC set to  0.000000
2/18/2012	6:32:43 PM	Bypass solenoid MFC set to  0.000000
2/18/2012	6:32:43 PM	Tube furnace set to 0
2/18/2012	6:32:46 PM	H2 valve closed
2/18/2012	6:32:46 PM	BCl3 valve closed
2/18/2012	6:32:46 PM	PH3 valve closed
2/18/2012	6:32:46 PM	SiCl4 pre valve closed
2/18/2012	6:32:46 PM	SiCl4 post valve closed
2/18/2012	6:32:46 PM	Main Vac valve closed
2/18/2012	6:32:46 PM	Bypass valve closed
2/18/2012	6:32:46 PM	Bubbler valve closed
2/18/2012	6:32:46 PM	Helium valve opened
2/18/2012	6:32:46 PM	Helium MFC set to  500.000000
2/18/2012	6:32:46 PM	H2 MFC set to  0.000000
2/18/2012	6:32:46 PM	BCl3 MFC set to  0.000000
2/18/2012	6:32:46 PM	PH3 MFC set to  0.000000
2/18/2012	6:32:46 PM	SiCl4 MFC set to  0.000000
2/18/2012	6:32:46 PM	Bypass solenoid MFC set to  0.000000
2/18/2012	6:32:46 PM	Tube furnace set to 0
2/18/2012	6:33:51 PM	Helium valve closed
2/18/2012	6:33:51 PM	H2 valve closed
2/18/2012	6:33:51 PM	BCl3 valve closed
2/18/2012	6:33:51 PM	PH3 valve closed
2/18/2012	6:33:51 PM	SiCl4 pre valve closed
2/18/2012	6:33:51 PM	SiCl4 post valve closed
2/18/2012	6:33:51 PM	Main Vac valve closed
2/18/2012	6:33:51 PM	Bypass valve closed
2/18/2012	6:33:51 PM	Bubbler valve closed
2/18/2012	6:33:51 PM	Helium MFC set to  0.000000
2/18/2012	6:33:51 PM	H2 MFC set to  0.000000
2/18/2012	6:33:51 PM	BCl3 MFC set to  0.000000
2/18/2012	6:33:51 PM	PH3 MFC set to  0.000000
2/18/2012	6:33:51 PM	SiCl4 MFC set to  0.000000
2/18/2012	6:33:51 PM	Bypass solenoid MFC set to  0.000000
2/18/2012	6:33:51 PM	Tube furnace set to 0
2/18/2012	6:33:52 PM	Run finished at 6:33 PM
2/18/2012	6:33:52 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/18/2012	6:41:31 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/18/2012	6:41:32 PM	Recipe started at 6:41 PM
2/18/2012	6:41:32 PM	Helium valve closed
2/18/2012	6:41:32 PM	H2 valve closed
2/18/2012	6:41:32 PM	BCl3 valve closed
2/18/2012	6:41:32 PM	PH3 valve closed
2/18/2012	6:41:32 PM	SiCl4 pre valve closed
2/18/2012	6:41:32 PM	SiCl4 post valve closed
2/18/2012	6:41:32 PM	Main Vac valve closed
2/18/2012	6:41:32 PM	Bubbler valve closed
2/18/2012	6:41:32 PM	Bypass valve opened
2/18/2012	6:41:32 PM	Helium MFC set to  0.000000
2/18/2012	6:41:32 PM	H2 MFC set to  0.000000
2/18/2012	6:41:32 PM	BCl3 MFC set to  0.000000
2/18/2012	6:41:32 PM	PH3 MFC set to  0.000000
2/18/2012	6:41:32 PM	SiCl4 MFC set to  0.000000
2/18/2012	6:41:32 PM	Bypass solenoid MFC set to  0.000000
2/18/2012	6:41:32 PM	Tube furnace set to 0
2/18/2012	6:42:35 PM	Helium valve closed
2/18/2012	6:42:35 PM	H2 valve closed
2/18/2012	6:42:35 PM	BCl3 valve closed
2/18/2012	6:42:35 PM	PH3 valve closed
2/18/2012	6:42:35 PM	SiCl4 pre valve closed
2/18/2012	6:42:36 PM	SiCl4 post valve closed
2/18/2012	6:42:36 PM	Main Vac valve closed
2/18/2012	6:42:36 PM	Bubbler valve closed
2/18/2012	6:42:36 PM	Bypass valve opened
2/18/2012	6:42:36 PM	Helium MFC set to  0.000000
2/18/2012	6:42:36 PM	H2 MFC set to  0.000000
2/18/2012	6:42:36 PM	BCl3 MFC set to  0.000000
2/18/2012	6:42:36 PM	PH3 MFC set to  0.000000
2/18/2012	6:42:36 PM	SiCl4 MFC set to  0.000000
2/18/2012	6:42:36 PM	Bypass solenoid MFC set to  0.000000
2/18/2012	6:42:36 PM	Tube furnace set to 0
2/18/2012	6:43:36 PM	Helium valve closed
2/18/2012	6:43:36 PM	H2 valve closed
2/18/2012	6:43:36 PM	BCl3 valve closed
2/18/2012	6:43:36 PM	PH3 valve closed
2/18/2012	6:43:36 PM	SiCl4 pre valve closed
2/18/2012	6:43:36 PM	SiCl4 post valve closed
2/18/2012	6:43:36 PM	Bypass valve closed
2/18/2012	6:43:36 PM	Bubbler valve closed
2/18/2012	6:43:36 PM	Main Vac valve opened
2/18/2012	6:43:36 PM	Helium MFC set to  0.000000
2/18/2012	6:43:36 PM	H2 MFC set to  0.000000
2/18/2012	6:43:36 PM	BCl3 MFC set to  0.000000
2/18/2012	6:43:36 PM	PH3 MFC set to  0.000000
2/18/2012	6:43:36 PM	SiCl4 MFC set to  0.000000
2/18/2012	6:43:36 PM	Bypass solenoid MFC set to  0.000000
2/18/2012	6:43:36 PM	Tube furnace set to 0
2/18/2012	6:43:37 PM	Run finished at 6:43 PM
2/18/2012	6:43:37 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/18/2012	7:06:49 PM	Recipe started at 7:06 PM
2/18/2012	7:06:49 PM	H2 valve closed
2/18/2012	7:06:49 PM	BCl3 valve closed
2/18/2012	7:06:49 PM	PH3 valve closed
2/18/2012	7:06:49 PM	SiCl4 pre valve closed
2/18/2012	7:06:49 PM	SiCl4 post valve closed
2/18/2012	7:06:49 PM	Main Vac valve closed
2/18/2012	7:06:49 PM	Bypass valve closed
2/18/2012	7:06:49 PM	Bubbler valve closed
2/18/2012	7:06:49 PM	Helium valve opened
2/18/2012	7:06:50 PM	Helium MFC set to  500.000000
2/18/2012	7:06:50 PM	H2 MFC set to  0.000000
2/18/2012	7:06:50 PM	BCl3 MFC set to  0.000000
2/18/2012	7:06:50 PM	PH3 MFC set to  0.000000
2/18/2012	7:06:50 PM	SiCl4 MFC set to  0.000000
2/18/2012	7:06:50 PM	Bypass solenoid MFC set to  0.000000
2/18/2012	7:06:50 PM	Tube furnace set to 180
2/18/2012	7:07:58 PM	H2 valve closed
2/18/2012	7:07:58 PM	BCl3 valve closed
2/18/2012	7:07:58 PM	PH3 valve closed
2/18/2012	7:07:58 PM	SiCl4 pre valve closed
2/18/2012	7:07:58 PM	SiCl4 post valve closed
2/18/2012	7:07:58 PM	Main Vac valve closed
2/18/2012	7:07:58 PM	Bypass valve closed
2/18/2012	7:07:58 PM	Helium valve opened
2/18/2012	7:07:58 PM	Bubbler valve opened
2/18/2012	7:07:58 PM	Helium MFC set to  500.000000
2/18/2012	7:07:58 PM	H2 MFC set to  0.000000
2/18/2012	7:07:58 PM	BCl3 MFC set to  0.000000
2/18/2012	7:07:58 PM	PH3 MFC set to  0.000000
2/18/2012	7:07:58 PM	SiCl4 MFC set to  0.000000
2/18/2012	7:07:58 PM	Bypass solenoid MFC set to  0.000000
2/18/2012	7:07:58 PM	Tube furnace set to 180
2/18/2012	7:08:58 PM	Helium valve closed
2/18/2012	7:08:58 PM	H2 valve closed
2/18/2012	7:08:58 PM	BCl3 valve closed
2/18/2012	7:08:58 PM	PH3 valve closed
2/18/2012	7:08:58 PM	SiCl4 pre valve closed
2/18/2012	7:08:58 PM	SiCl4 post valve closed
2/18/2012	7:08:58 PM	Main Vac valve closed
2/18/2012	7:08:58 PM	Bubbler valve closed
2/18/2012	7:08:58 PM	Bypass valve opened
2/18/2012	7:08:58 PM	Helium MFC set to  0.000000
2/18/2012	7:08:58 PM	H2 MFC set to  0.000000
2/18/2012	7:08:58 PM	BCl3 MFC set to  0.000000
2/18/2012	7:08:58 PM	PH3 MFC set to  0.000000
2/18/2012	7:08:58 PM	SiCl4 MFC set to  0.000000
2/18/2012	7:08:58 PM	Bypass solenoid MFC set to  0.000000
2/18/2012	7:08:59 PM	Tube furnace set to 180
2/18/2012	7:09:49 PM	Helium valve closed
2/18/2012	7:09:49 PM	H2 valve closed
2/18/2012	7:09:49 PM	BCl3 valve closed
2/18/2012	7:09:49 PM	PH3 valve closed
2/18/2012	7:09:49 PM	SiCl4 pre valve closed
2/18/2012	7:09:49 PM	SiCl4 post valve closed
2/18/2012	7:09:49 PM	Main Vac valve closed
2/18/2012	7:09:49 PM	Bubbler valve closed
2/18/2012	7:09:49 PM	Bypass valve opened
2/18/2012	7:09:49 PM	Helium MFC set to  0.000000
2/18/2012	7:09:49 PM	H2 MFC set to  0.000000
2/18/2012	7:09:49 PM	BCl3 MFC set to  0.000000
2/18/2012	7:09:49 PM	PH3 MFC set to  0.000000
2/18/2012	7:09:49 PM	SiCl4 MFC set to  0.000000
2/18/2012	7:09:49 PM	Bypass solenoid MFC set to  0.000000
2/18/2012	7:09:49 PM	Tube furnace set to 180
2/18/2012	7:10:49 PM	Helium valve closed
2/18/2012	7:10:49 PM	H2 valve closed
2/18/2012	7:10:49 PM	BCl3 valve closed
2/18/2012	7:10:49 PM	PH3 valve closed
2/18/2012	7:10:49 PM	SiCl4 pre valve closed
2/18/2012	7:10:49 PM	SiCl4 post valve closed
2/18/2012	7:10:49 PM	Bypass valve closed
2/18/2012	7:10:49 PM	Bubbler valve closed
2/18/2012	7:10:49 PM	Main Vac valve opened
2/18/2012	7:10:49 PM	Helium MFC set to  0.000000
2/18/2012	7:10:49 PM	H2 MFC set to  0.000000
2/18/2012	7:10:49 PM	BCl3 MFC set to  0.000000
2/18/2012	7:10:49 PM	PH3 MFC set to  0.000000
2/18/2012	7:10:49 PM	SiCl4 MFC set to  0.000000
2/18/2012	7:10:49 PM	Bypass solenoid MFC set to  0.000000
2/18/2012	7:10:49 PM	Tube furnace set to 180
2/18/2012	8:40:50 PM	H2 valve closed
2/18/2012	8:40:50 PM	BCl3 valve closed
2/18/2012	8:40:50 PM	PH3 valve closed
2/18/2012	8:40:50 PM	SiCl4 pre valve closed
2/18/2012	8:40:50 PM	SiCl4 post valve closed
2/18/2012	8:40:50 PM	Bypass valve closed
2/18/2012	8:40:50 PM	Bubbler valve closed
2/18/2012	8:40:50 PM	Helium valve opened
2/18/2012	8:40:50 PM	Main Vac valve opened
2/18/2012	8:40:50 PM	Helium MFC set to  10.000000
2/18/2012	8:40:50 PM	H2 MFC set to  0.000000
2/18/2012	8:40:50 PM	BCl3 MFC set to  0.000000
2/18/2012	8:40:50 PM	PH3 MFC set to  0.000000
2/18/2012	8:40:50 PM	SiCl4 MFC set to  0.000000
2/18/2012	8:40:50 PM	Bypass solenoid MFC set to  0.000000
2/18/2012	8:40:50 PM	Tube furnace set to 180
2/18/2012	8:41:20 PM	Helium valve closed
2/18/2012	8:41:20 PM	H2 valve closed
2/18/2012	8:41:20 PM	BCl3 valve closed
2/18/2012	8:41:20 PM	PH3 valve closed
2/18/2012	8:41:20 PM	SiCl4 pre valve closed
2/18/2012	8:41:20 PM	SiCl4 post valve closed
2/18/2012	8:41:20 PM	Bypass valve closed
2/18/2012	8:41:20 PM	Bubbler valve closed
2/18/2012	8:41:20 PM	Main Vac valve opened
2/18/2012	8:41:20 PM	Helium MFC set to  0.000000
2/18/2012	8:41:20 PM	H2 MFC set to  0.000000
2/18/2012	8:41:20 PM	BCl3 MFC set to  0.000000
2/18/2012	8:41:20 PM	PH3 MFC set to  0.000000
2/18/2012	8:41:20 PM	SiCl4 MFC set to  0.000000
2/18/2012	8:41:20 PM	Bypass solenoid MFC set to  0.000000
2/18/2012	8:41:20 PM	Tube furnace set to 180
2/18/2012	8:41:50 PM	H2 valve closed
2/18/2012	8:41:50 PM	BCl3 valve closed
2/18/2012	8:41:50 PM	PH3 valve closed
2/18/2012	8:41:50 PM	SiCl4 pre valve closed
2/18/2012	8:41:50 PM	SiCl4 post valve closed
2/18/2012	8:41:50 PM	Bypass valve closed
2/18/2012	8:41:50 PM	Bubbler valve closed
2/18/2012	8:41:50 PM	Helium valve opened
2/18/2012	8:41:50 PM	Main Vac valve opened
2/18/2012	8:41:50 PM	Helium MFC set to  10.000000
2/18/2012	8:41:50 PM	H2 MFC set to  0.000000
2/18/2012	8:41:50 PM	BCl3 MFC set to  0.000000
2/18/2012	8:41:50 PM	PH3 MFC set to  0.000000
2/18/2012	8:41:50 PM	SiCl4 MFC set to  0.000000
2/18/2012	8:41:50 PM	Bypass solenoid MFC set to  0.000000
2/18/2012	8:41:50 PM	Tube furnace set to 180
2/18/2012	8:42:20 PM	Helium valve closed
2/18/2012	8:42:20 PM	H2 valve closed
2/18/2012	8:42:20 PM	BCl3 valve closed
2/18/2012	8:42:20 PM	PH3 valve closed
2/18/2012	8:42:20 PM	SiCl4 pre valve closed
2/18/2012	8:42:20 PM	SiCl4 post valve closed
2/18/2012	8:42:20 PM	Bypass valve closed
2/18/2012	8:42:20 PM	Bubbler valve closed
2/18/2012	8:42:20 PM	Main Vac valve opened
2/18/2012	8:42:20 PM	Helium MFC set to  0.000000
2/18/2012	8:42:20 PM	H2 MFC set to  0.000000
2/18/2012	8:42:20 PM	BCl3 MFC set to  0.000000
2/18/2012	8:42:20 PM	PH3 MFC set to  0.000000
2/18/2012	8:42:20 PM	SiCl4 MFC set to  0.000000
2/18/2012	8:42:20 PM	Bypass solenoid MFC set to  0.000000
2/18/2012	8:42:20 PM	Tube furnace set to 180
2/18/2012	8:44:20 PM	Helium valve closed
2/18/2012	8:44:20 PM	BCl3 valve closed
2/18/2012	8:44:20 PM	PH3 valve closed
2/18/2012	8:44:20 PM	SiCl4 pre valve closed
2/18/2012	8:44:20 PM	SiCl4 post valve closed
2/18/2012	8:44:20 PM	Main Vac valve closed
2/18/2012	8:44:20 PM	Bypass valve closed
2/18/2012	8:44:20 PM	Bubbler valve closed
2/18/2012	8:44:20 PM	H2 valve opened
2/18/2012	8:44:20 PM	Helium MFC set to  0.000000
2/18/2012	8:44:20 PM	H2 MFC set to  500.000000
2/18/2012	8:44:20 PM	BCl3 MFC set to  0.000000
2/18/2012	8:44:20 PM	PH3 MFC set to  0.000000
2/18/2012	8:44:20 PM	SiCl4 MFC set to  0.000000
2/18/2012	8:44:20 PM	Bypass solenoid MFC set to  0.000000
2/18/2012	8:44:21 PM	Tube furnace set to 1000
2/18/2012	8:45:24 PM	Helium valve closed
2/18/2012	8:45:24 PM	BCl3 valve closed
2/18/2012	8:45:24 PM	PH3 valve closed
2/18/2012	8:45:24 PM	SiCl4 pre valve closed
2/18/2012	8:45:24 PM	SiCl4 post valve closed
2/18/2012	8:45:24 PM	Main Vac valve closed
2/18/2012	8:45:24 PM	Bypass valve closed
2/18/2012	8:45:24 PM	H2 valve opened
2/18/2012	8:45:24 PM	Bubbler valve opened
2/18/2012	8:45:24 PM	Helium MFC set to  0.000000
2/18/2012	8:45:24 PM	H2 MFC set to  500.000000
2/18/2012	8:45:24 PM	BCl3 MFC set to  0.000000
2/18/2012	8:45:24 PM	PH3 MFC set to  0.000000
2/18/2012	8:45:24 PM	SiCl4 MFC set to  0.000000
2/18/2012	8:45:24 PM	Bypass solenoid MFC set to  0.000000
2/18/2012	8:45:24 PM	Tube furnace set to 1000
2/18/2012	8:45:25 PM	Helium valve closed
2/18/2012	8:45:25 PM	BCl3 valve closed
2/18/2012	8:45:25 PM	PH3 valve closed
2/18/2012	8:45:25 PM	SiCl4 pre valve closed
2/18/2012	8:45:25 PM	SiCl4 post valve closed
2/18/2012	8:45:25 PM	Main Vac valve closed
2/18/2012	8:45:25 PM	Bypass valve closed
2/18/2012	8:45:25 PM	H2 valve opened
2/18/2012	8:45:25 PM	Bubbler valve opened
2/18/2012	8:45:25 PM	Helium MFC set to  0.000000
2/18/2012	8:45:25 PM	H2 MFC set to  500.000000
2/18/2012	8:45:25 PM	BCl3 MFC set to  0.000000
2/18/2012	8:45:25 PM	PH3 MFC set to  0.000000
2/18/2012	8:45:25 PM	SiCl4 MFC set to  0.000000
2/18/2012	8:45:25 PM	Bypass solenoid MFC set to  0.000000
2/18/2012	8:45:26 PM	Tube furnace set to 1000
2/18/2012	9:10:25 PM	Helium valve closed
2/18/2012	9:10:25 PM	PH3 valve closed
2/18/2012	9:10:25 PM	Main Vac valve closed
2/18/2012	9:10:25 PM	Bypass valve closed
2/18/2012	9:10:25 PM	H2 valve opened
2/18/2012	9:10:25 PM	BCl3 valve opened
2/18/2012	9:10:26 PM	SiCl4 pre valve opened
2/18/2012	9:10:26 PM	SiCl4 post valve opened
2/18/2012	9:10:26 PM	Bubbler valve opened
2/18/2012	9:10:26 PM	Helium MFC set to  0.000000
2/18/2012	9:10:26 PM	H2 MFC set to  500.000000
2/18/2012	9:10:26 PM	BCl3 MFC set to  1.500000
2/18/2012	9:10:26 PM	PH3 MFC set to  0.000000
2/18/2012	9:10:26 PM	SiCl4 MFC set to  50.000000
2/18/2012	9:10:26 PM	Bypass solenoid MFC set to  0.000000
2/18/2012	9:10:26 PM	Tube furnace set to 1000
2/18/2012	9:28:26 PM	Helium valve closed
2/18/2012	9:28:26 PM	BCl3 valve closed
2/18/2012	9:28:26 PM	PH3 valve closed
2/18/2012	9:28:26 PM	SiCl4 pre valve closed
2/18/2012	9:28:26 PM	SiCl4 post valve closed
2/18/2012	9:28:26 PM	Main Vac valve closed
2/18/2012	9:28:26 PM	Bypass valve closed
2/18/2012	9:28:26 PM	H2 valve opened
2/18/2012	9:28:26 PM	Bubbler valve opened
2/18/2012	9:28:26 PM	Helium MFC set to  0.000000
2/18/2012	9:28:26 PM	H2 MFC set to  500.000000
2/18/2012	9:28:26 PM	BCl3 MFC set to  0.000000
2/18/2012	9:28:26 PM	PH3 MFC set to  0.000000
2/18/2012	9:28:26 PM	SiCl4 MFC set to  0.000000
2/18/2012	9:28:26 PM	Bypass solenoid MFC set to  0.000000
2/18/2012	9:28:26 PM	Tube furnace set to 975
2/18/2012	9:29:56 PM	Helium valve closed
2/18/2012	9:29:56 PM	BCl3 valve closed
2/18/2012	9:29:56 PM	PH3 valve closed
2/18/2012	9:29:56 PM	SiCl4 pre valve closed
2/18/2012	9:29:56 PM	SiCl4 post valve closed
2/18/2012	9:29:56 PM	Main Vac valve closed
2/18/2012	9:29:56 PM	Bypass valve closed
2/18/2012	9:29:56 PM	H2 valve opened
2/18/2012	9:29:56 PM	Bubbler valve opened
2/18/2012	9:29:56 PM	Helium MFC set to  0.000000
2/18/2012	9:29:56 PM	H2 MFC set to  500.000000
2/18/2012	9:29:56 PM	BCl3 MFC set to  0.000000
2/18/2012	9:29:56 PM	PH3 MFC set to  0.000000
2/18/2012	9:29:56 PM	SiCl4 MFC set to  0.000000
2/18/2012	9:29:56 PM	Bypass solenoid MFC set to  0.000000
2/18/2012	9:29:56 PM	Tube furnace set to 950
2/18/2012	9:31:26 PM	Helium valve closed
2/18/2012	9:31:26 PM	BCl3 valve closed
2/18/2012	9:31:26 PM	PH3 valve closed
2/18/2012	9:31:26 PM	SiCl4 pre valve closed
2/18/2012	9:31:26 PM	SiCl4 post valve closed
2/18/2012	9:31:26 PM	Main Vac valve closed
2/18/2012	9:31:26 PM	Bypass valve closed
2/18/2012	9:31:26 PM	H2 valve opened
2/18/2012	9:31:26 PM	Bubbler valve opened
2/18/2012	9:31:26 PM	Helium MFC set to  0.000000
2/18/2012	9:31:26 PM	H2 MFC set to  500.000000
2/18/2012	9:31:26 PM	BCl3 MFC set to  0.000000
2/18/2012	9:31:26 PM	PH3 MFC set to  0.000000
2/18/2012	9:31:26 PM	SiCl4 MFC set to  0.000000
2/18/2012	9:31:26 PM	Bypass solenoid MFC set to  0.000000
2/18/2012	9:31:26 PM	Tube furnace set to 925
2/18/2012	9:32:56 PM	Helium valve closed
2/18/2012	9:32:56 PM	BCl3 valve closed
2/18/2012	9:32:56 PM	PH3 valve closed
2/18/2012	9:32:56 PM	SiCl4 pre valve closed
2/18/2012	9:32:56 PM	SiCl4 post valve closed
2/18/2012	9:32:56 PM	Main Vac valve closed
2/18/2012	9:32:56 PM	Bypass valve closed
2/18/2012	9:32:56 PM	H2 valve opened
2/18/2012	9:32:56 PM	Bubbler valve opened
2/18/2012	9:32:56 PM	Helium MFC set to  0.000000
2/18/2012	9:32:56 PM	H2 MFC set to  500.000000
2/18/2012	9:32:56 PM	BCl3 MFC set to  0.000000
2/18/2012	9:32:56 PM	PH3 MFC set to  0.000000
2/18/2012	9:32:56 PM	SiCl4 MFC set to  0.000000
2/18/2012	9:32:56 PM	Bypass solenoid MFC set to  0.000000
2/18/2012	9:32:56 PM	Tube furnace set to 900
2/18/2012	9:34:26 PM	H2 valve closed
2/18/2012	9:34:26 PM	BCl3 valve closed
2/18/2012	9:34:26 PM	PH3 valve closed
2/18/2012	9:34:26 PM	SiCl4 pre valve closed
2/18/2012	9:34:26 PM	SiCl4 post valve closed
2/18/2012	9:34:26 PM	Main Vac valve closed
2/18/2012	9:34:26 PM	Bypass valve closed
2/18/2012	9:34:26 PM	Helium valve opened
2/18/2012	9:34:26 PM	Bubbler valve opened
2/18/2012	9:34:26 PM	Helium MFC set to  500.000000
2/18/2012	9:34:26 PM	H2 MFC set to  0.000000
2/18/2012	9:34:26 PM	BCl3 MFC set to  0.000000
2/18/2012	9:34:26 PM	PH3 MFC set to  0.000000
2/18/2012	9:34:26 PM	SiCl4 MFC set to  0.000000
2/18/2012	9:34:26 PM	Bypass solenoid MFC set to  0.000000
2/18/2012	9:34:27 PM	Tube furnace set to 875
2/18/2012	9:35:57 PM	H2 valve closed
2/18/2012	9:35:57 PM	BCl3 valve closed
2/18/2012	9:35:57 PM	PH3 valve closed
2/18/2012	9:35:57 PM	SiCl4 pre valve closed
2/18/2012	9:35:57 PM	SiCl4 post valve closed
2/18/2012	9:35:57 PM	Main Vac valve closed
2/18/2012	9:35:57 PM	Bypass valve closed
2/18/2012	9:35:57 PM	Helium valve opened
2/18/2012	9:35:57 PM	Bubbler valve opened
2/18/2012	9:35:57 PM	Helium MFC set to  500.000000
2/18/2012	9:35:57 PM	H2 MFC set to  0.000000
2/18/2012	9:35:57 PM	BCl3 MFC set to  0.000000
2/18/2012	9:35:57 PM	PH3 MFC set to  0.000000
2/18/2012	9:35:57 PM	SiCl4 MFC set to  0.000000
2/18/2012	9:35:57 PM	Bypass solenoid MFC set to  0.000000
2/18/2012	9:35:57 PM	Tube furnace set to 850
2/18/2012	9:37:27 PM	H2 valve closed
2/18/2012	9:37:27 PM	BCl3 valve closed
2/18/2012	9:37:27 PM	PH3 valve closed
2/18/2012	9:37:27 PM	SiCl4 pre valve closed
2/18/2012	9:37:27 PM	SiCl4 post valve closed
2/18/2012	9:37:27 PM	Main Vac valve closed
2/18/2012	9:37:27 PM	Bypass valve closed
2/18/2012	9:37:27 PM	Helium valve opened
2/18/2012	9:37:27 PM	Bubbler valve opened
2/18/2012	9:37:27 PM	Helium MFC set to  500.000000
2/18/2012	9:37:27 PM	H2 MFC set to  0.000000
2/18/2012	9:37:27 PM	BCl3 MFC set to  0.000000
2/18/2012	9:37:27 PM	PH3 MFC set to  0.000000
2/18/2012	9:37:27 PM	SiCl4 MFC set to  0.000000
2/18/2012	9:37:27 PM	Bypass solenoid MFC set to  0.000000
2/18/2012	9:37:27 PM	Tube furnace set to 825
2/18/2012	9:38:57 PM	H2 valve closed
2/18/2012	9:38:57 PM	BCl3 valve closed
2/18/2012	9:38:57 PM	PH3 valve closed
2/18/2012	9:38:57 PM	SiCl4 pre valve closed
2/18/2012	9:38:57 PM	SiCl4 post valve closed
2/18/2012	9:38:57 PM	Main Vac valve closed
2/18/2012	9:38:57 PM	Bypass valve closed
2/18/2012	9:38:57 PM	Helium valve opened
2/18/2012	9:38:57 PM	Bubbler valve opened
2/18/2012	9:38:57 PM	Helium MFC set to  500.000000
2/18/2012	9:38:57 PM	H2 MFC set to  0.000000
2/18/2012	9:38:57 PM	BCl3 MFC set to  0.000000
2/18/2012	9:38:57 PM	PH3 MFC set to  0.000000
2/18/2012	9:38:57 PM	SiCl4 MFC set to  0.000000
2/18/2012	9:38:57 PM	Bypass solenoid MFC set to  0.000000
2/18/2012	9:38:57 PM	Tube furnace set to 800
2/18/2012	9:40:27 PM	H2 valve closed
2/18/2012	9:40:27 PM	BCl3 valve closed
2/18/2012	9:40:27 PM	PH3 valve closed
2/18/2012	9:40:27 PM	SiCl4 pre valve closed
2/18/2012	9:40:27 PM	SiCl4 post valve closed
2/18/2012	9:40:27 PM	Main Vac valve closed
2/18/2012	9:40:27 PM	Bypass valve closed
2/18/2012	9:40:27 PM	Helium valve opened
2/18/2012	9:40:27 PM	Bubbler valve opened
2/18/2012	9:40:27 PM	Helium MFC set to  500.000000
2/18/2012	9:40:27 PM	H2 MFC set to  0.000000
2/18/2012	9:40:27 PM	BCl3 MFC set to  0.000000
2/18/2012	9:40:27 PM	PH3 MFC set to  0.000000
2/18/2012	9:40:27 PM	SiCl4 MFC set to  0.000000
2/18/2012	9:40:27 PM	Bypass solenoid MFC set to  0.000000
2/18/2012	9:40:27 PM	Tube furnace set to 0
2/18/2012	9:55:27 PM	Helium valve closed
2/18/2012	9:55:27 PM	H2 valve closed
2/18/2012	9:55:27 PM	BCl3 valve closed
2/18/2012	9:55:27 PM	PH3 valve closed
2/18/2012	9:55:27 PM	SiCl4 pre valve closed
2/18/2012	9:55:27 PM	SiCl4 post valve closed
2/18/2012	9:55:27 PM	Main Vac valve closed
2/18/2012	9:55:27 PM	Bypass valve closed
2/18/2012	9:55:27 PM	Bubbler valve closed
2/18/2012	9:55:27 PM	Helium MFC set to  0.000000
2/18/2012	9:55:27 PM	H2 MFC set to  0.000000
2/18/2012	9:55:27 PM	BCl3 MFC set to  0.000000
2/18/2012	9:55:27 PM	PH3 MFC set to  0.000000
2/18/2012	9:55:27 PM	SiCl4 MFC set to  0.000000
2/18/2012	9:55:27 PM	Bypass solenoid MFC set to  0.000000
2/18/2012	9:55:28 PM	Tube furnace set to 0
2/18/2012	10:55:28 PM	H2 valve closed
2/18/2012	10:55:28 PM	BCl3 valve closed
2/18/2012	10:55:28 PM	PH3 valve closed
2/18/2012	10:55:28 PM	SiCl4 pre valve closed
2/18/2012	10:55:28 PM	SiCl4 post valve closed
2/18/2012	10:55:28 PM	Main Vac valve closed
2/18/2012	10:55:28 PM	Bypass valve closed
2/18/2012	10:55:28 PM	Bubbler valve closed
2/18/2012	10:55:28 PM	Helium valve opened
2/18/2012	10:55:28 PM	Helium MFC set to  500.000000
2/18/2012	10:55:28 PM	H2 MFC set to  0.000000
2/18/2012	10:55:28 PM	BCl3 MFC set to  0.000000
2/18/2012	10:55:28 PM	PH3 MFC set to  0.000000
2/18/2012	10:55:28 PM	SiCl4 MFC set to  0.000000
2/18/2012	10:55:28 PM	Bypass solenoid MFC set to  0.000000
2/18/2012	10:55:28 PM	Tube furnace set to 0
2/18/2012	10:55:33 PM	H2 valve closed
2/18/2012	10:55:33 PM	BCl3 valve closed
2/18/2012	10:55:33 PM	PH3 valve closed
2/18/2012	10:55:33 PM	SiCl4 pre valve closed
2/18/2012	10:55:33 PM	SiCl4 post valve closed
2/18/2012	10:55:33 PM	Main Vac valve closed
2/18/2012	10:55:33 PM	Bypass valve closed
2/18/2012	10:55:33 PM	Helium valve opened
2/18/2012	10:55:33 PM	Bubbler valve opened
2/18/2012	10:55:33 PM	Helium MFC set to  500.000000
2/18/2012	10:55:33 PM	H2 MFC set to  0.000000
2/18/2012	10:55:33 PM	BCl3 MFC set to  0.000000
2/18/2012	10:55:33 PM	PH3 MFC set to  0.000000
2/18/2012	10:55:33 PM	SiCl4 MFC set to  0.000000
2/18/2012	10:55:33 PM	Bypass solenoid MFC set to  0.000000
2/18/2012	10:55:34 PM	Tube furnace set to 0
2/18/2012	10:57:34 PM	Helium valve closed
2/18/2012	10:57:34 PM	H2 valve closed
2/18/2012	10:57:34 PM	BCl3 valve closed
2/18/2012	10:57:34 PM	PH3 valve closed
2/18/2012	10:57:34 PM	SiCl4 pre valve closed
2/18/2012	10:57:34 PM	SiCl4 post valve closed
2/18/2012	10:57:34 PM	Main Vac valve closed
2/18/2012	10:57:34 PM	Bypass valve closed
2/18/2012	10:57:34 PM	Bubbler valve closed
2/18/2012	10:57:34 PM	Helium MFC set to  0.000000
2/18/2012	10:57:34 PM	H2 MFC set to  0.000000
2/18/2012	10:57:34 PM	BCl3 MFC set to  0.000000
2/18/2012	10:57:34 PM	PH3 MFC set to  0.000000
2/18/2012	10:57:34 PM	SiCl4 MFC set to  0.000000
2/18/2012	10:57:34 PM	Bypass solenoid MFC set to  0.000000
2/18/2012	10:57:34 PM	Tube furnace set to 0
2/18/2012	10:57:35 PM	Helium valve closed
2/18/2012	10:57:35 PM	H2 valve closed
2/18/2012	10:57:35 PM	BCl3 valve closed
2/18/2012	10:57:35 PM	PH3 valve closed
2/18/2012	10:57:35 PM	SiCl4 pre valve closed
2/18/2012	10:57:35 PM	SiCl4 post valve closed
2/18/2012	10:57:35 PM	Main Vac valve closed
2/18/2012	10:57:35 PM	Bubbler valve closed
2/18/2012	10:57:35 PM	Bypass valve opened
2/18/2012	10:57:35 PM	Helium MFC set to  0.000000
2/18/2012	10:57:35 PM	H2 MFC set to  0.000000
2/18/2012	10:57:35 PM	BCl3 MFC set to  0.000000
2/18/2012	10:57:35 PM	PH3 MFC set to  0.000000
2/18/2012	10:57:35 PM	SiCl4 MFC set to  0.000000
2/18/2012	10:57:35 PM	Bypass solenoid MFC set to  0.000000
2/18/2012	10:57:35 PM	Tube furnace set to 0
2/18/2012	10:58:22 PM	Helium valve closed
2/18/2012	10:58:22 PM	H2 valve closed
2/18/2012	10:58:22 PM	BCl3 valve closed
2/18/2012	10:58:22 PM	PH3 valve closed
2/18/2012	10:58:22 PM	SiCl4 pre valve closed
2/18/2012	10:58:22 PM	SiCl4 post valve closed
2/18/2012	10:58:22 PM	Main Vac valve closed
2/18/2012	10:58:22 PM	Bubbler valve closed
2/18/2012	10:58:22 PM	Bypass valve opened
2/18/2012	10:58:22 PM	Helium MFC set to  0.000000
2/18/2012	10:58:22 PM	H2 MFC set to  0.000000
2/18/2012	10:58:22 PM	BCl3 MFC set to  0.000000
2/18/2012	10:58:22 PM	PH3 MFC set to  0.000000
2/18/2012	10:58:22 PM	SiCl4 MFC set to  0.000000
2/18/2012	10:58:22 PM	Bypass solenoid MFC set to  0.000000
2/18/2012	10:58:23 PM	Tube furnace set to 0
2/18/2012	10:59:23 PM	Helium valve closed
2/18/2012	10:59:23 PM	H2 valve closed
2/18/2012	10:59:23 PM	BCl3 valve closed
2/18/2012	10:59:23 PM	PH3 valve closed
2/18/2012	10:59:23 PM	SiCl4 pre valve closed
2/18/2012	10:59:23 PM	SiCl4 post valve closed
2/18/2012	10:59:23 PM	Bypass valve closed
2/18/2012	10:59:23 PM	Bubbler valve closed
2/18/2012	10:59:23 PM	Main Vac valve opened
2/18/2012	10:59:23 PM	Helium MFC set to  0.000000
2/18/2012	10:59:23 PM	H2 MFC set to  0.000000
2/18/2012	10:59:23 PM	BCl3 MFC set to  0.000000
2/18/2012	10:59:23 PM	PH3 MFC set to  0.000000
2/18/2012	10:59:23 PM	SiCl4 MFC set to  0.000000
2/18/2012	10:59:23 PM	Bypass solenoid MFC set to  0.000000
2/18/2012	10:59:23 PM	Tube furnace set to 0
